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Silicon nitride stress liner impacts on MoS2 photodetectors | ResearchHub
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Silicon nitride stress liner impacts on MoS2 photodetectors
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Authors
Shengqun Hu
7 more
Shengqun Hu
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Zeliang Liao
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•
Xinke Liu
Published
May 14, 2021
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Journal
Journal of Applied Physics
Topics
Physics
DOI
10.1063/5.0042943
