A comprehensive investigation of the impact of Ge profile shape as well as the scaling of collector and base doping profiles on high-injection heterojunction barrier effects in SiGe HBTs has been conducted over the -73-85/spl deg/C temperature range. The onset of Kirk effect at high current densities is shown to expose the Si/SiGe heterojunction in the collector-base space charge region, thereby inducing a conduction band barrier which negatively impacts the collector and base currents as well as the dynamic response, leading to a premature roll-off in both /spl beta/ and f/sub T/. In light of this, careful profile optimization is critical for emerging SiGe HBT circuit applications, since they typically operate at high current densities to realize maximum performance. We first explore the experimental consequences and electrical signature of these barrier effects over the 200-358 K temperature range for a variety of Ge profiles from an advanced UHV/CVD SiGe HBT technology. We then use extensive simulations which were calibrated to measured results to explore the sensitivity of these barrier effects to both the Ge profile shape and collector profile design, and hence investigate the optimum profile design points as a function of vertical scaling.

Optimization of SiGe HBTs for operation at high current densities