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Phase change memory technology
Materials Chemistry
Electrical And Electronic Engineering
Polymers And Plastics
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Authors
Geoffrey W. Burr
,
Matthew J. Breitwisch
Michele Franceschini
,
Davide Garetto
,
Kailash Gopalakrishnan
,
Bryan Jackson
,
Bulent Kurdi
,
Chung Lam
,
Luis A. Lastras
,
Alvaro Padilla
,
Bipin Rajendran
,
Simone Raoux
,
Rohit S. Shenoy
,
Geoffrey Burr
,
B. Kurdi
,
C. Lam
,
M. Breitwisch
,
Luis Lastras
+16 authors
,
Rohit Shenoy
Journal
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena
Published
Mar 1, 2010
DOI
10.1116/1.3301579
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