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A Piezoelectric MEMS Resonant Temperature Sensor with 10-... | ResearchHub
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A Piezoelectric MEMS Resonant Temperature Sensor with 10-μk Resolution and 0.06-PJK2 Resolution FOM
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Authors
Ying‐Jin Yuan
8 more
Ying‐Jin Yuan
•
Hexu Luo
6 more
•
Menglun Zhang
Published
January 21, 2024
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Topics
Computer Science
Materials Science
Physics
Artificial Intelligence
Quantum Mechanics
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DOI
10.1109/mems58180.2024.10439359
