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Fabrication of micro fluidic cavities using Si-to-glass a... | ResearchHub
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Fabrication of micro fluidic cavities using Si-to-glass anodic bonding
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Authors
Nikolay Zhelev
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Nikolay Zhelev
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T. Abhilash
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•
J. Saunders
Published
June 12, 2018
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Topics
Physics
Materials Science
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DOI
10.1063/1.5031837
License
arXiv License
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Topics
Physics
Materials Science
Chemistry
Medicine
Pathology
Show all topics
DOI
10.1063/1.5031837
License
arXiv License
