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Motion Control of Wafer Scanners in Lithography Systems: From Setpoint Generation to Multi-Stage Coordination
Artificial Intelligence
Paleontology
Biomedical Engineering
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Authors
Fazhi Song
,
Yang Liu
Dong Yue
,
Xinkai Chen
+2 authors
,
Jiubin Tan
Journal
IEEE Transactions on Instrumentation and Measurement
Published
Jan 1, 2024
DOI
10.1109/tim.2024.3413202
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