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Motion Control of Wafer Scanners in Lithography Systems: ... | ResearchHub
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Motion Control of Wafer Scanners in Lithography Systems: From Setpoint Generation to Multi-Stage Coordination
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Authors
Fazhi Song
4 more
Fazhi Song
•
Yang Liu
2 more
•
Jiubin Tan
Published
January 1, 2024
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Journal
IEEE Transactions on Instrumentation and Measurement
Topics
Biology
Materials Science
Computer Science
Engineering
Artificial Intelligence
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DOI
10.1109/tim.2024.3413202
