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Wafer-level InP-Si covalent bonding and defect-free heter... | ResearchHub
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Wafer-level InP-Si covalent bonding and defect-free heterointerface for photonic quantum systems
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Authors
Qiushi Kang
5 more
Qiushi Kang
•
Fanfan Niu
3 more
•
Chenxi Wang
Published
June 1, 2024
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Journal
Applied Surface Science
Topics
Chemistry
Materials Science
Organic Chemistry
Electrical And Electronic Engineering
Atomic And Molecular Physics, And Optics
Show all topics
DOI
10.1016/j.apsusc.2024.160614
