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CMOS-compatible photonic integrated circuits on thin-film... | ResearchHub
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CMOS-compatible photonic integrated circuits on thin-film ScAlN
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Authors
Sihao Wang
13 more
Sihao Wang
•
Veerendra Dhyani
11 more
•
Dongmei Zhu
Published
June 12, 2024
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Topics
Physics
Materials Science
Engineering
Medicine
Optics
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DOI
10.1063/5.0208517
License
CC-BY
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Supporters
Support the authors with ResearchCoin
Tip RSC
Preprint Server
Topics
Physics
Materials Science
Engineering
Medicine
Optics
Show all topics
DOI
10.1063/5.0208517
License
CC-BY
Other Formats
PDF