Abstract

Humidity sensors with ultrafast response and recovery speed are very popular for humidity monitoring in dynamic environments such as complex operating conditions and human body monitoring. In this work, we prepared titanium dioxide quantum dots by hydrothermal synthesis and silica microspheres by Stober method. In addition, the electrostatic self-assembly method was used to prepare the two films with ultrafast response for moisture sensitivity. Due to the superhydrophilic properties of TiO2 QDs, water molecules can be adsorbed and resolved quickly on their surface. While the addition of SiO2 microspheres further increases the specific surface area of moisture-sensitive films and improves the moisture-sensitive properties of TiO2 QDs. The TiO2 QDs/SiO2 resistive humidity sensors not only exhibit excellent stability and repeatability, but also have fast water adsorption/desorption capacity. Between 11 % and 97 % relative humidity, the resistance change of the sensor reaches 6 orders of magnitude. In order to simulate the actual application environment, an experimental platform was built to verify the ultrafast response of the humidity sensor, and the response/recovery time of the sensor was as short as 22.4 ms/40.8 ms, which can quickly detect the change of humidity. The TiO2 QDs/SiO2 ultrafast humidity sensors proposed in this paper have great application potential in rapidly changing humidity environments such as complex working conditions, human body detection, humidity alarm and voice recognition.