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Annealing behaviors of open spaces and gas desorption in ... | ResearchHub
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Annealing behaviors of open spaces and gas desorption in chemical vapor deposited SiO2 studied with monoenergetic positron beams
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Authors
Akira Uedono
6 more
Akira Uedono
•
Ryu Hasunuma
4 more
•
Nagayasu Oshima
Published
July 23, 2024
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Journal
Journal of Applied Physics
Topics
Physics
Materials Science
Chemistry
Engineering
Nuclear Physics
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DOI
10.1063/5.0217760
