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Design of Virtual Simulation Experiment for Semiconductor... | ResearchHub
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Design of Virtual Simulation Experiment for Semiconductor Oxidation Process Based on Unity3D
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Authors
Zhiliang Zhang
3 more
Zhiliang Zhang
•
Jindong Li
1 more
•
Xiaodong Sun
Published
June 7, 2024
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Topics
Computer Science
Materials Science
Artificial Intelligence
Control And Systems Engineering
Simulation
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DOI
10.1109/yac63405.2024.10598611
