Paper
Paper
Search...
Search ResearchHub...
Ctrl+K
New
Home
Browse
Earn
Fund
RH Journal
Notebook
Lists
Leaderboard
RSC
USD
Changelog
Terms
Privacy
Issues
Docs
Support
Foundation
About
Design of Virtual Simulation Experiment for Semiconductor... | ResearchHub
Paper
Paper
Search...
Search ResearchHub...
Ctrl+K
New
Home
Browse
Earn
Fund
RH Journal
Notebook
Lists
Leaderboard
RSC
USD
Changelog
Terms
Privacy
Issues
Docs
Support
Foundation
About
Design of Virtual Simulation Experiment for Semiconductor Oxidation Process Based on Unity3D
0
Authors
Zhiliang Zhang
3 more
Zhiliang Zhang
•
Jindong Li
1 more
•
Xiaodong Sun
Published
June 7, 2024
Paper
Conversation
0
Reviews
0
Bounties
0
Sign in to comment
Add a comment...
Best
Supporters
Support the authors with ResearchCoin
Tip RSC
Topics
Computer Science
Materials Science
Artificial Intelligence
Control And Systems Engineering
Simulation
Show all topics
DOI
10.1109/yac63405.2024.10598611
