Abstract

In this study, protective AlMo0.5NbTa0.5TiZr refractory high-entropy alloy coatings were prepared by DC magnetron sputtering, and the influence of deposition temperature on the microstructure, deposition rate, mechanical properties, and adhesion force was investigated in detail. All coatings are in a nearly amorphous state. Their elastic recovery ratio (ηw), microhardness (H), elastic strain failure strength (H/E), plastic deformation strength (H3/E2), and adhesion force (Lc2) are positively correlated with deposition temperature mainly attributing to the synergy of increased thickness and the generation of the nanocrystal. The coating reaches its maximum ηw, H, H/E, H3/E2, and Lc2 of 43.87 ± 0.94 %, 12.74 ± 0.37 GPa, 0.073 ± 0.002, and 0.067 ± 0.005 GPa at the deposition temperature of 500 °C and exhibits superior wear resistance and resistance to plastic deformation, compared with reported refractory Cr and α-Ta coatings.