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Low-Frequency Dependence of Plasma Characteristics in Dua... | ResearchHub
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Low-Frequency Dependence of Plasma Characteristics in Dual-Frequency Capacitively Coupled Plasma Sources
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Authors
Kai Zhao
3 more
Kai Zhao
•
Ying Zhou
1 more
•
Y.-N. Wang
Published
June 16, 2024
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Topics
Physics
Materials Science
Engineering
Nuclear Physics
Atomic Physics
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DOI
10.1109/icops58192.2024.10627697
