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Study on the Evolution Characteristics ofAr Plasma and Th... | ResearchHub
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Study on the Evolution Characteristics ofAr Plasma and Their Impacts on Depositing Films
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Authors
Yajun Fu
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Yajun Fu
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Puguang Ji
Published
June 16, 2024
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Topics
Computer Science
Materials Science
Physics
Nuclear Physics
Electrical And Electronic Engineering
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DOI
10.1109/icops58192.2024.10625912
