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Gate oxide reliability: upcoming trends, challenges, and opportunities
Authors
Ben Kaczer,R. Degraeve
J. Franco,Tibor Grasser,Ph. Roussel,E. Bury,Pieter Weckx,Adrian Chasin,Stanislav Tyaginov,Michiel Vandemaele,Alexander Grill,Barry O’Sullivan,J. Fortuny,Pablo Canflanca,Michael Waltl,Pietro Rinaudo,Ying Zhao,Emily Kao,Ruben Asanovski,E. Catapano,Arthur Beckers,Andrea Vici,B. Truijen,Y. Higashi,Sergiu Clima,Yang Xiang,D. Sangani,L. Panarella,Quentin Smets,Theresia Knobloch,Dominic Waldhoer,Benoît Troeye,Yuanxiong Guo,Anastasiia Kruv,K. Viswakarma,Mario González
+34 authors
,D. LintenPublished
Jun 15, 2024
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