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Research progress of quantum dot photolithography pattern... | ResearchHub
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Research progress of quantum dot photolithography patterning and direct photolithography application
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Authors
Zhong Chen
•
Yu Li
1 more
•
Aiwei Tang
Published
August 24, 2024
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Journal
Nano Research
Topics
Materials Science
Materials Chemistry
Resist
Multiple Patterning
Computational Lithography
Show all topics
DOI
10.1007/s12274-024-6896-7