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Modeling of multi-trigger resists | ResearchHub
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Modeling of multi-trigger resists
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Authors
Thiago Santos
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Thiago Santos
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Zelalem Belete
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Alexandra McClelland
Published
September 18, 2024
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Topics
Computer Science
Materials Science
Electrical And Electronic Engineering
Nanotechnology
Resist
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DOI
10.1117/12.3027941
