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300mm+ substrate UV/DUV low-cost, reliable periodic patte... | ResearchHub
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300mm+ substrate UV/DUV low-cost, reliable periodic patterning solution for high-volume manufacturing
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Authors
Kelsey Wooley
9 more
Kelsey Wooley
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Harun Solak
7 more
•
Li Wang
Published
April 10, 2024
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Topics
Computer Science
Materials Science
Physics
Quantum Mechanics
Optics
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DOI
10.1117/12.3013328
