Abstract

Abstract Doping a small amount of ethanol gas (EtOH) in argon can change the argon plasma jet from the filamentary discharge mode to the diffuse discharge mode, and further doping with trace oxygen can significantly enhance the composition and content of oxygen-containing active particles in the argon plasma. Based on this, the discharge characteristics of an Ar+EtOH plasma jet under different concentrations of oxygen doping and its effect on the surface modification effect of polyimide (PI) films were investigated in this paper. It was found that the discharge characteristics of Ar+EtOH+O2 plasma jet deteriorate with the increase of oxygen doping concentration, but the plasma jet remained stable and diffuse with the gas temperature close to room temperature when the oxygen doping concentration is 0~4000 ppm. Through the water contact angle measurement and peel strength test, it was found that when the oxygen doping concentration was 800 ppm, the Ar+EtOH+O2 plasma jet treatment for 180 s had the best effect on the improvement of surface wettability and adhesion of the PI films, and the water contact angle was reduced from ~71.9° to ~17.6°. At the same time, the peel strength was increased from 122 N/m to 418 N/m, which is an increase of ~243%. Combined with the material characterization analysis, it was found that the surface roughness of the PI films was enhanced and more C-O and C=O bonds were grafted on the surface after the Ar+EtOH+O2 plasma jet treatment. Finally, through the two-dimensional axisymmetric argon-doped ethanol plasma jet hydrodynamic simulation analysis, it was found that when the working gas Ar+EtOH was doped with 800 ppm O2, the number density of OH did not change much, but the number density of O2－ was about 6 orders of magnitude higher than that of the non-doped O2. The mechanism that Ar+EtOH+O2 plasma jet could improve more wettability and bonding of PI films in a shorter treatment time was revealed.