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Multi-Vt Gate Stack Technologies for Nanosheet and CFET D... | ResearchHub
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Multi-Vt Gate Stack Technologies for Nanosheet and CFET Devices
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Authors
Hiroaki Arimura
11 more
Hiroaki Arimura
•
J. Franco
9 more
•
N. Horiguchi
Published
June 15, 2024
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Topics
Computer Science
Materials Science
Engineering
Electrical And Electronic Engineering
Nanotechnology
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DOI
10.1109/snw63608.2024.10639201
