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Evaluation of area scaling of the reactive ion-plasma etc... | ResearchHub
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Evaluation of area scaling of the reactive ion-plasma etched astronomical diffraction gratings
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Authors
Hanshin Lee
2 more
Hanshin Lee
•
Uma Subash
•
Menelaos Poutous
Published
August 26, 2024
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Topics
Computer Science
Materials Science
Mathematics
Physics
Quantum Mechanics
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DOI
10.1117/12.3020302
