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Density Multiplication and Improved Lithography by Direct... | ResearchHub
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Density Multiplication and Improved Lithography by Directed Block Copolymer Assembly
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Authors
Ricardo Ruiz
8 more
Ricardo Ruiz
•
E. Dobisz
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•
Paul Nealey
Published
August 14, 2008
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Science
Topics
Mathematics
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DOI
10.1126/science.1157626
