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Thin Film Piezoelectrics for MEMS | ResearchHub
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Thin Film Piezoelectrics for MEMS
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Authors
Susan Trolier‐McKinstry
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Susan Trolier‐McKinstry
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Paul Muralt
Published
January 1, 2004
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Journal
Journal of Electroceramics
Topics
Chemistry
Materials Science
Engineering
Organic Chemistry
Materials Chemistry
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DOI
10.1023/b:jecr.0000033998.72845.51
