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Microfabrication of cantilever styli for the atomic force... | ResearchHub
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Microfabrication of cantilever styli for the atomic force microscope
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Authors
T. Albrecht
3 more
T. Albrecht
•
S. Akamine
1 more
•
C. Quate
Published
July 1, 1990
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Journal
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
Topics
Physics
Materials Science
Medicine
Pathology
Atomic And Molecular Physics, And Optics
Show all topics
DOI
10.1116/1.576520
