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Miniaturized Multi-Cantilever MEMS Resonators with Low Motional Impedance
Biomedical Engineering
Electrical And Electronic Engineering
Atomic And Molecular Physics, And Optics
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Authors
Haolin Li
,
Qingrui Yang
Yi Yuan
,
Shuai Shi
,
Pengfei Niu
,
Quanning Li
,
Xuejiao Chen
,
Menglun Zhang
,
Wei Pang
+7 authors
,
Qiuhui Yang
Journal
Micromachines
Published
May 24, 2024
DOI
10.3390/mi15060688
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