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Miniaturized Multi-Cantilever MEMS Resonators with Low Mo... | ResearchHub
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Miniaturized Multi-Cantilever MEMS Resonators with Low Motional Impedance
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Authors
Haolin Li
8 more
Haolin Li
•
Qiuhui Yang
6 more
•
Wei Pang
Published
May 24, 2024
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Journal
Micromachines
Topics
Physics
Materials Science
Engineering
Atomic Physics
Atomic And Molecular Physics, And Optics
Show all topics
DOI
10.3390/mi15060688
License
CC-BY
Other Formats
PDF
Supporters
Support the authors with ResearchCoin
Tip RSC
Journal
Micromachines
Topics
Physics
Materials Science
Engineering
Atomic Physics
Atomic And Molecular Physics, And Optics
Show all topics
DOI
10.3390/mi15060688
License
CC-BY
Other Formats
PDF
