Abstract

To improve the voltage threshold (V th ), off-current (I off ), and reliability of 15nm ovonic threshold switching (OTS) selectors in one-selector-one-resistor (1S1R) devices, multilayered heterostructures (HS) of AsSeGeS and GeN were studied by varying both the thickness ratio of AsSeGeS to GeN (T OTS /T GeN ) and the number of GeN layers. Electrical results showed that all HS configurations had an increased V th and I off stability testing up to 10 11 cycles. Notably, HS devices with an increased T OTS /T GeN ratio exhibited the lowest I off values. Analysis revealed that the contributions to V th were greater from thicker GeN layers than from the interfacial barriers between AsSeGeS and GeN. Raman spectroscopy further showed that the proportion of Ge bonds changed with layer thickness, with thicker GeN layers exhibiting a higher number of Ge-Ge bonds. Optimized for 1S1R operation, 15nm HS devices achieved an I off of 0.4nA, a V th of 3.25V, and significantly improved I off cycling variance, demonstrating the potential of HS to enhance device performance.