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Surface Topography Control for Polymer/Cu Hybrid Bonding | ResearchHub
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Surface Topography Control for Polymer/Cu Hybrid Bonding
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Authors
Yûzô Nakamura
5 more
Yûzô Nakamura
•
K. Hayama
3 more
•
Fumihiro Inoue
Published
April 17, 2024
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Topics
Computer Science
Materials Science
Engineering
Chemical Engineering
Electrical And Electronic Engineering
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DOI
10.23919/icep61562.2024.10535664
