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Overview of atomic layer etching in the semiconductor ind... | ResearchHub
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Overview of atomic layer etching in the semiconductor industry
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Authors
Keren Kanarik
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Keren Kanarik
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Thorsten Lill
6 more
•
Richard Gottscho
Published
March 1, 2015
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Journal
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
Topics
Engineering
Materials Science
Electrical And Electronic Engineering
Manufacturing Engineering
Nanotechnology
Show all topics
DOI
10.1116/1.4913379
License
CC-BY
Other Formats
PDF
Supporters
Support the authors with ResearchCoin
Tip RSC
Journal
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
Topics
Engineering
Materials Science
Electrical And Electronic Engineering
Manufacturing Engineering
Nanotechnology
Show all topics
DOI
10.1116/1.4913379
License
CC-BY
Other Formats
PDF
