Abstract

Radio frequency (RF) inductively coupled plasma (ICP) sources for nuclear fusion are operated at low gas pressures, high power densities and low driving frequencies. The Faraday Shield (FS) is applied in order to protect the quartz vessel from the plasma and surface interaction. In this study, a 3D fluid model is developed to simulate the high-density plasma in the RF ICP source. Both FS and magnetic field filter are taken into account in this model. The study is focused on the spatial variations of the density and temperature of electrons under the conditions of various gas pressure (0.5–2.0 Pa), the RF current (50–140 A) and the remanent magnetization of permanent magnet (0–1.03 T). The obtained numerical results show that the temperature of electrons increases in the presence of FS owing to the strong electric field induced by FS. In addition, the density of electrons in front of the plasma grid increases in the presence of FS. This study can deepen the understanding of the prototype RF ICP source with the magnetic field filter and FS.