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Single cell detection with micromechanical oscillators | ResearchHub
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Single cell detection with micromechanical oscillators
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Authors
B. Ilic
6 more
B. Ilic
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David Czaplewski
4 more
•
C. Batt
Published
November 1, 2001
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Journal
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
Topics
Physics
Materials Science
Chemistry
Engineering
Optics
Show all topics
DOI
10.1116/1.1421572
