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Low-Loss SOI Photonic Wires and Ring Resonators Fabricated With Deep UV Lithography
Electrical And Electronic Engineering
Atomic And Molecular Physics, And Optics
Surfaces, Coatings And Films
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Authors
Pieter Dumon
,
Wim Bogaerts
Vincent Wiaux
,
Johan Wouters
,
S. Beckx
,
Joris Campenhout
,
Dirk Taillaert
,
Bert Luyssaert
,
Peter Bienstman
,
Dries Thourhout
+8 authors
,
Roel Baets
Journal
IEEE Photonics Technology Letters
Published
May 1, 2004
DOI
10.1109/lpt.2004.826025
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