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Giant Piezoelectricity on Si for Hyperactive MEMS | ResearchHub
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Giant Piezoelectricity on Si for Hyperactive MEMS
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Authors
Seung‐Hyub Baek
27 more
Seung‐Hyub Baek
•
Y. Chen
25 more
•
Chang‐Beom Eom
Published
November 17, 2011
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Journal
Science
Topics
Physics
Materials Science
Materials Chemistry
Electrical And Electronic Engineering
Microelectromechanical Systems
Show all topics
DOI
10.1126/science.1207186
