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Polymer-Derived Ceramics Thin-Film Plasma Anemometer with... | ResearchHub
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Polymer-Derived Ceramics Thin-Film Plasma Anemometer with High Resistance to Plasma Sputtering
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Authors
Hongcheng Wei
5 more
Hongcheng Wei
•
Haoran Li
3 more
•
Qinnan Chen
Published
January 1, 2024
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Journal
IEEE Sensors Journal
Topics
Physics
Materials Science
Nuclear Physics
Electrical And Electronic Engineering
Composite Material
Show all topics
DOI
10.1109/jsen.2024.3409533
