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Resolution Limits of Electron-Beam Lithography toward the... | ResearchHub
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Resolution Limits of Electron-Beam Lithography toward the Atomic Scale
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Authors
Vitor Manfrinato
6 more
Vitor Manfrinato
•
Lihua Zhang
4 more
•
Karl Berggren
Published
March 14, 2013
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Journal
Nano Letters
Topics
Computer Science
Materials Science
Physics
Artificial Intelligence
Quantum Mechanics
Show all topics
DOI
10.1021/nl304715p
Other Formats
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Supporters
Support the authors with ResearchCoin
Tip RSC
Journal
Nano Letters
Topics
Computer Science
Materials Science
Physics
Artificial Intelligence
Quantum Mechanics
Show all topics
DOI
10.1021/nl304715p
Other Formats
PDF
