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Ultralow-Loss Silicon Nitride Microresonators Using Room-... | ResearchHub
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Ultralow-Loss Silicon Nitride Microresonators Using Room-Temperature Sputtering
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Authors
Shuangyou Zhang
8 more
Shuangyou Zhang
•
Toby Bi
6 more
•
Pascal Del’Haye
Published
August 4, 2024
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Topics
Physics
Materials Science
Materials Chemistry
Electrical And Electronic Engineering
Silicon Nitride
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DOI
10.1109/cleo-pr60912.2024.10676445