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Access devices for 3D crosspoint memory
Electrical And Electronic Engineering
Machine Learning
Computer Science
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Authors
Geoffrey Burr
,
Rohit Shenoy
Kumar Virwani
,
Pritish Narayanan
,
Alvaro Padilla
,
B. Kurdi
+4 authors
,
Hyunsang Hwang
Journal
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena
Published
Jul 1, 2014
DOI
10.1116/1.4889999
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