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A flexoelectric microelectromechanical system on silicon | ResearchHub
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A flexoelectric microelectromechanical system on silicon
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Authors
Umesh Bhaskar
6 more
Umesh Bhaskar
•
Darrell Schlom
4 more
•
Gustau Catalán
Published
November 16, 2015
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Journal
Nature Nanotechnology
Topics
Mathematics
Materials Science
Physics
Engineering
Quantum Mechanics
Show all topics
DOI
10.1038/nnano.2015.260
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Supporters
Support the authors with ResearchCoin
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Journal
Nature Nanotechnology
Topics
Mathematics
Materials Science
Physics
Engineering
Quantum Mechanics
Show all topics
DOI
10.1038/nnano.2015.260
Other Formats
PDF
