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Resolving nanoscale composition fluctuations and defects ... | ResearchHub
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Resolving nanoscale composition fluctuations and defects in advanced interconnects: a crucial step to comprehend thin film resistivity
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Authors
Claudia Fleischmann
6 more
Claudia Fleischmann
•
Akira Uedono
4 more
•
Zsolt Tőkei
Published
June 3, 2024
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Topics
Engineering
Materials Science
Electrical And Electronic Engineering
Electronic, Optical And Magnetic Materials
Nanotechnology
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DOI
10.1109/iitc61274.2024.10732594
