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Redefining 2-Level Semi-Damascene Interconnect Technology... | ResearchHub
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Redefining 2-Level Semi-Damascene Interconnect Technology: Benchmarking three different Fully Self-aligned Via options
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Authors
Giulio Marti
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Giulio Marti
•
Gilles Delie
10 more
•
Zsolt Tőkei
Published
June 3, 2024
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Topics
Computer Science
Engineering
Electrical And Electronic Engineering
Electronic, Optical And Magnetic Materials
Telecommunications
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DOI
10.1109/iitc61274.2024.10732570
