Paper
Paper
Search...
Search ResearchHub...
Ctrl+K
New
Home
Browse
Earn
Fund
RH Journal
Notebook
Lists
Leaderboard
RSC
USD
Changelog
Terms
Privacy
Issues
Docs
Support
Foundation
About
Redefining 2-Level Semi-Damascene Interconnect Technology... | ResearchHub
Paper
Paper
Search...
Search ResearchHub...
Ctrl+K
New
Home
Browse
Earn
Fund
RH Journal
Notebook
Lists
Leaderboard
RSC
USD
Changelog
Terms
Privacy
Issues
Docs
Support
Foundation
About
Redefining 2-Level Semi-Damascene Interconnect Technology: Benchmarking three different Fully Self-aligned Via options
0
Authors
Giulio Marti
12 more
Giulio Marti
•
Gilles Delie
10 more
•
Zsolt Tőkei
Published
June 3, 2024
Paper
Conversation
0
Reviews
0
Bounties
0
Sign in to comment
Add a comment...
Best
Supporters
Support the authors with ResearchCoin
Tip RSC
Topics
Computer Science
Engineering
Electrical And Electronic Engineering
Electronic, Optical And Magnetic Materials
Telecommunications
Show all topics
DOI
10.1109/iitc61274.2024.10732570
