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Highly Reliable Ruthenium-Cobalt Binary Liner for Advance... | ResearchHub
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Highly Reliable Ruthenium-Cobalt Binary Liner for Advanced Node Cu Interconnect
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Authors
Gyuho Myeong
17 more
Gyuho Myeong
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Junki Jang
15 more
•
Jong-Ho Lee
Published
June 3, 2024
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Topics
Computer Science
Materials Science
Mathematics
Chemistry
Engineering
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DOI
10.1109/iitc61274.2024.10732516
