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Demonstration of MP18-26nm Ru Semi-Damascene Spacer-is-Di... | ResearchHub
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Demonstration of MP18-26nm Ru Semi-Damascene Spacer-is-Dielectric SADP Integration
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Authors
C. Wu
18 more
C. Wu
•
S. Decoster
16 more
•
Zsolt Tőkei
Published
June 3, 2024
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Topics
Computer Science
Materials Science
Mechanical Engineering
General Materials Science
Electrical And Electronic Engineering
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DOI
10.1109/iitc61274.2024.10732062
