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Thin-film piezoelectric MEMS | ResearchHub
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Thin-film piezoelectric MEMS
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Authors
Chang‐Beom Eom
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Chang‐Beom Eom
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Susan Trolier‐McKinstry
Published
November 1, 2012
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Journal
MRS Bulletin
Topics
Engineering
Materials Science
Materials Chemistry
Biomedical Engineering
Electrical And Electronic Engineering
Show all topics
DOI
10.1557/mrs.2012.273
