Abstract

Abstract Defects are inherent in transition metal dichalcogenides and significantly affect their chemical and physical properties. In this study, surface defect electrochemical nanopatterning is proposed as a promising method to tune in a controlled manner the electronic and functional properties of defective MoS₂ thin films. Using parallel electrochemical nanolithography, MoS₂ thin films are patterned, creating sulphur vacancy‐rich active zones alternated with defect‐free regions over a centimetre scale area, with sub‐micrometre spatial resolution. The patterned films display tailored optical and electronic properties due to the formation of sulphur vacancy‐rich areas. Moreover, the effectiveness of defect nanopatterning in tuning functional properties is demonstrated by studying the electrocatalytic activity for the hydrogen evolution reaction.