Optimization of Soft X-Ray Fresnel Zone Plate Fabrication Through Joint Electron Beam Lithography and Cryo-Etching Techniques

Supporters

Support the authors with ResearchCoin

Tip RSC

Journal

Nanomaterials

Topics

Physics

Materials Science

Medicine

Quantum Mechanics

Optics

Show all topics

DOI

10.3390/nano14231898

License

CC-BY