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Fabrication of a novel Mn-based slurry via chemical preci... | ResearchHub
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Fabrication of a novel Mn-based slurry via chemical precipitation and ultrasonic impregnation for efficient planarization of 4H-SiC (0001) through chemical mechanical polishing
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Authors
Shi-Dong Chen
3 more
Shi-Dong Chen
•
Hong Lei
1 more
•
Liqiang Luo
Published
November 1, 2024
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Journal
Ceramics International
Topics
Physics
Materials Science
Engineering
Medicine
Pathology
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DOI
10.1016/j.ceramint.2024.11.421
