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Pattern distortion in nanoimprint lithography using UV-curable polymer stamps
Biomedical Engineering
Electrical And Electronic Engineering
Materials Science
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Authors
Fangfang Li
,
Marina Fetisova
Mervi Koskinen
,
Jukka Viheriälä
,
Tapio Niemi
,
Petri Karvinen
+4 authors
,
Markku Kuittinen
Journal
Micro and Nano Engineering
Published
Nov 1, 2024
DOI
10.1016/j.mne.2024.100293
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