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Acoustoelectric RF Mechanical Oscillator with Optomechanical Readout
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Jan 1, 2024
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Abstract
We present a CMOS-fabricated optomechanical microdisk resonator with acoustoelectric gain for a 949 MHz mechanical mode. Applying +5V of DC bias results in a 9.5 dB increase in the optically-detected RF power of the microdisk.
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