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Wafer-scale fabrication of low-noise vacuum-gap Fabry-Pé... | ResearchHub
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Wafer-scale fabrication of low-noise vacuum-gap Fabry-Pérot resonators with 10–13 stability
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Authors
Naijun Jin
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Naijun Jin
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Haotian Cheng
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Peter Rakich
Published
January 1, 2024
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Journal
Frontiers in Optics + Laser Science 2022 (FIO, LS)
Topics
Computer Science
Materials Science
Medicine
Artificial Intelligence
Pathology
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DOI
10.1364/fio.2024.jw4a.73